Minimizing junction damage associated with nickel silicide formation for the front side metallization of silicon solar cells

Tous, LoicLoicTousvan Dorp, DennisDennisvan DorpHernandez, Jose LuisJose LuisHernandezAllebe, ChristopheChristopheAllebeNgamo, MichelMichelNgamoBender, HugoHugoBenderMeersschaut, JohanJohanMeersschautAleman, MonicaMonicaAlemanRussell, RichardRichardRussellPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19907Minimizing junction damage associated with nickel silicide formation for the front side metallization of silicon solar cellsProceedings paper