Yu, HaoHaoYuSchaekers, MarcMarcSchaekersSchram, TomTomSchramDemuynck, StevenStevenDemuynckHoriguchi, NaotoNaotoHoriguchiBarla, KathyKathyBarlaCollaert, NadineNadineCollaertThean, AaronAaronTheanDe Meyer, KristinKristinDe Meyer2021-10-232021-10-2320160018-9383https://imec-publications.be/handle/20.500.12860/27644Thermal stability concern of metal-insulator-semiconductor contact: a case study of Ti/TiO2/n-Si contactJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7476867