Verdonck, PatrickPatrickVerdonckAresti, MaitaneMaitaneArestiFerchichi, AbdelkarimAbdelkarimFerchichiVan Besien, ElsElsVan BesienStafford, BenBenStaffordDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18260The influence of N containing plasmas on low-k filmsOral presentation