Zhao, ChaoChaoZhaoDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsCosnier, VincentVincentCosnierMaes, JanJanMaesRoebben, G.G.RoebbenVan der Biest, O.O.Van der Biest2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8440Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIRProceedings paper