Petry, JasmineJasminePetryXiong, K.K.XiongRagnarsson, Lars-AkeLars-AkeRagnarssonSinganamalla, RaghunathRaghunathSinganamallaHooker, JacobJacobHooker2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12700Effect of degas before metal gate deposition on the threshold voltageJournal article