Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology

Saraza Canflanca, PabloPabloSaraza CanflancaDiaz Fortuny, JavierJavierDiaz FortunyVici, AndreaAndreaViciBury, ErikErikBuryDegraeve, RobinRobinDegraeveKaczer, BenBenKaczer2023-11-222023-07-152023-11-2220231541-7026WOS:001007431500046https://imec-publications.be/handle/20.500.12860/42154Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technologyProceedings paper10.1109/IRPS48203.2023.10117773978-1-6654-5672-2WOS:001007431500046VOLTAGE ACCELERATIONBREAKDOWNTIME