Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz

Lauerhaas, JeffJeffLauerhaasXu, KaidongKaidongXuVereecke, GuyGuyVereeckeVos, RitaRitaVosKenis, KarineKarineKenisMertens, PaulPaulMertensWu, Y.Y.WuNicolosi, T.T.NicolosiHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5432Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHzMeeting abstract