Leonov, VladimirVladimirLeonovPerova, NataliaNataliaPerovaVermeiren, JanJanVermeirenGrietens, BobBobGrietensGoessens, ClausClausGoessensDe Moor, PietPietDe MoorVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6532Optimization of design and technology for uncooled polySiGe microbolometer arraysProceedings paper