Berghmans, BartBartBerghmansRip, JensJensRipVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011-010142-2421https://imec-publications.be/handle/20.500.12860/18555Cesium retention during sputtering with low energy Cs+ and oxygen floodingJournal article