Fadida, SivanSivanFadidaShekhter, P.P.ShekhterCvetko, D.D.CvetkoFloreano, L.L.FloreanoVerdini, AAVerdiniNyns, LauraLauraNynsVan Elshocht, SvenSvenVan ElshochtKymissis, I.I.KymissisEizenberg, MosheMosheEizenberg2021-10-222021-10-2220140021-8979https://imec-publications.be/handle/20.500.12860/23801Direct observation of both contact and remote oxygen scavenging of GeO2 in a metal-oxide-semiconductor stackJournal articlehttp://dx.doi.org/10.1063/1.4898645