Low temperature deposition and characterization of high quality nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membrane

Drijkoningen, SienSienDrijkoningen2021-10-242021-10-242017-01https://imec-publications.be/handle/20.500.12860/28279Low temperature deposition and characterization of high quality nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membranePHD thesis