Pikulev, VitalyVitalyPikulevDictus, DriesDriesDictusKlekachev, AlexanderAlexanderKlekachevBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14318New properties of halogen plasma-treated Cu filmsOral presentation