Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Rajendran, KhannanKhannanRajendranPandey, AwanishAwanishPandeyEdinger, PierrePierreEdingerJo, GaehunGaehunJoTakabayashi, Alain YujiAlain YujiTakabayashiKhan, Muhammad UmarMuhammad UmarKhanVerheyen, PeterPeterVerheyenQuack, NielsNielsQuackNiklaus, FrankFrankNiklausBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.GylfasonVan Thourhout, DriesDriesVan Thourhout2023-08-082023-06-202023-08-0820211949-2081WOS:000783824500029https://imec-publications.be/handle/20.500.12860/41849Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS PlatformProceedings paper10.1109/GFP51802.2021.9673877978-1-6654-2224-6WOS:000783824500029OPTICAL FORCES