Dutta, ShibeshShibeshDuttaOpsomer, KarlKarlOpsomerHoque, AnamulAnamulHoquePeeters, KristofKristofPeetersRichard, OlivierOlivierRichardDetavernier, ChristopheChristopheDetavernierVan Elshocht, SvenSvenVan ElshochtBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiVandervorst, WilfriedWilfriedVandervorstAdelmann, ChristophChristophAdelmann2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26588Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnectsMeeting abstract