Composition and thickness dependence of GeSn growth by chemical vapor deposition

Wang, WeiWeiWangShimura, YosukeYosukeShimuraNieddu, ThomasThomasNiedduGencarelli, FedericaFedericaGencarelliNguyen, DuyDuyNguyenVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLoo2021-10-212021-10-212013-06https://imec-publications.be/handle/20.500.12860/23379Composition and thickness dependence of GeSn growth by chemical vapor depositionProceedings paper