Analysis of halo implant influence on the self-heating and self-heating enhanced impact ionization on 0.13μm floating-body partially-depleted SOI MOSFET at low temperature

Pavanello, M.A.M.A.PavanelloMartino, J.J.MartinoSimoen, EddyEddySimoenMercha, AbdelkarimAbdelkarimMerchaClaeys, CorCorClaeysvan Meer, HansHansvan MeerDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7986Analysis of halo implant influence on the self-heating and self-heating enhanced impact ionization on 0.13μm floating-body partially-depleted SOI MOSFET at low temperatureProceedings paper