Millimeter wave micromachined cavity resonators on MCM-D: oscillator-resonator co-design and packaging considerations

Ocket, IljaIljaOcketPhommahaxay, AlainAlainPhommahaxayTilmans, HarrieHarrieTilmansMills, J.J.MillsNauwelaers, BartBartNauwelaers2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15935Millimeter wave micromachined cavity resonators on MCM-D: oscillator-resonator co-design and packaging considerationsProceedings paper