Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance

Akheyar, AmalAmalAkheyarLauwers, AnneAnneLauwersKittl, JorgeJorgeKittlde Potter de ten Broeck, MurielMurielde Potter de ten BroeckChamirian, OxanaOxanaChamirianJonckheere, RikRikJonckheereLeunissen, PeterPeterLeunissenVan Dal, MarkMarkVan DalLindsay, RichardRichardLindsayTempel, GeorgGeorgTempelMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7127Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistanceProceedings paper