Top-down InGaAs nanowire and Fin vertical FETs with record performance

Ramesh, SivaSivaRameshIvanov, TsvetanTsvetanIvanovCamerotto, ElisabethElisabethCamerottoSun, N.N.SunFranco, JacopoJacopoFrancoSibaja-Hernandez, ArturoArturoSibaja-HernandezRooyackers, RitaRitaRooyackersAlian, AliRezaAliRezaAlianLoo, JosineJosineLooVeloso, AnabelaAnabelaVelosoMilenin, AlexeyAlexeyMileninLin, DennisDennisLinFavia, PaolaPaolaFaviaBender, HugoHugoBenderCollaert, NadineNadineCollaertThean, AaronAaronTheanDe Meyer, KristinKristinDe Meyer2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27190Top-down InGaAs nanowire and Fin vertical FETs with record performanceProceedings paper