Akatsu, T.T.AkatsuDeguet, C.C.DeguetSanchez, L.L.SanchezRichtarch, C.C.RichtarchAllibert, F.F.AllibertLetertre, F.F.LetertreMazure, C.C.MazureKernevez, N.N.KernevezClavelier, L.L.ClavelierLe Royer, C.C.Le RoyerHartmann, J.M.J.M.HartmannLoup, V.V.LoupMeuris, MarcMarcMeurisDe Jaeger, BriceBriceDe JaegerRaskin, G.G.Raskin2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10012200 mm Germanium-on-insulator(GeOI) by smart cut technology and recent GeOI MOSFETs achievementsProceedings paper