Post epitaxy thermal treatment and passivation for extended carrier lifetime in Ge virtual substrates

Porret, ClémentClémentPorretSrinivasan, AshwynAshwynSrinivasanCott, DaireDaireCottPaul, RajrupaRajrupaPaulAnand, SakshiSakshiAnandPantouvaki, MariannaMariannaPantouvakiVan Thourhout, DriesDriesVan ThourhoutVan Campenhout, JorisJorisVan CampenhoutLoo, RogerRogerLoo2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29207Post epitaxy thermal treatment and passivation for extended carrier lifetime in Ge virtual substratesMeeting abstract