Towards a model for the electrical contact and the sample surface for scanning spreading resistance microscopy

Eyben, PierrePierreEybenDenis, S.S.DenisClarysse, TrudoTrudoClarysseAlvarez, DavidDavidAlvarezVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7560Towards a model for the electrical contact and the sample surface for scanning spreading resistance microscopyMeeting abstract