Transfer printing of silicon-on-insulator devices on silicon nitride waveguide circuits: design of coupling structures and process development

Muliuk, GrigorijGrigorijMuliukYe, NanNanYeUvin, SarahSarahUvinTrindade, AntonioAntonioTrindadeBower, ChrisChrisBowerVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27053Transfer printing of silicon-on-insulator devices on silicon nitride waveguide circuits: design of coupling structures and process developmentProceedings paper