Electron energy dependence of defect generation in high-k gate stacks

O'Connor, RobertRobertO'ConnorPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveKauerauf, ThomasThomasKaueraufKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12631Electron energy dependence of defect generation in high-k gate stacksOral presentation