Influences of hydrogen on losses in silicon oxynitride planar optical waveguides

Sahu, B. S.B. S.SahuAgnihotri, Om PrakashOm PrakashAgnihotriJain, SureshSureshJainMertens, RobertRobertMertensNijs, JohanJohanNijsIsamu, K.K.Isamu2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4716Influences of hydrogen on losses in silicon oxynitride planar optical waveguidesProceedings paper