Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy

Bender, HugoHugoBenderVerhaverbeke, StevenStevenVerhaverbekeHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/40Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopyJournal article