Analysis of diffusion mechanisms for SSD in confined volumes : An alternative solution for extension formation in N7 and N5 technologies

Eyben, PierrePierreEybenPawlak, BartekBartekPawlakDe Keersgieter, AnAnDe KeersgieterKikuchi, YoshiakiYoshiakiKikuchiMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchiMocuta, DanDanMocutaMocuta, AndaAndaMocuta2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30690Analysis of diffusion mechanisms for SSD in confined volumes : An alternative solution for extension formation in N7 and N5 technologiesMeeting abstract