On the effects of a pressure iInduced amorphous silicon layer on consecutive spreading resistance microscopy scans of doped silicon

Coq Germanicus, RosineRosineCoq GermanicusLeclère, PhilippePhilippeLeclèreGuhel, Y.Y.GuhelBoudart, B.B.BoudartTouboul, A. D.A. D.TouboulDescamps, P.P.DescampsHug, E.E.HugEyben, PierrePierreEyben2021-10-222021-10-2220150021-8979https://imec-publications.be/handle/20.500.12860/25101On the effects of a pressure iInduced amorphous silicon layer on consecutive spreading resistance microscopy scans of doped siliconJournal articlehttp://scitation.aip.org/content/aip/journal/jap/117/24/10.1063/1.4923052