A 3D electrical characterization of single stacking faults in InP by conductive-AFM

Mannarino, ManuelManuelMannarinoCelano, UmbertoUmbertoCelanoLu, AugustinAugustinLuChintala, Ravi ChandraRavi ChandraChintalaParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25604A 3D electrical characterization of single stacking faults in InP by conductive-AFMMeeting abstract