Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari, RachidRachidHaouariJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusFigeys, BrunoBrunoFigeysLagae, LiesbetLiesbetLagaeRottenberg, XavierXavierRottenberg2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28455Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)Proceedings paperhttps://www.techconnect.org/proceedings/paper.html?volume=TCB2017v4&chapter=3&paper=958