Politou, MariaMariaPolitouWu, XiangyuXiangyuWuAsselberghs, IngeIngeAsselberghsContino, AntoninoAntoninoContinoSoree, BartBartSoreeRadu, IulianaIulianaRaduHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokeiDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-242021-10-2420170167-9317https://imec-publications.be/handle/20.500.12860/29201Evaluation of multilayer graphene for advanced interconnectsJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171630421X