Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11135Compact and high-accuracy RF MEMS capacitive series devicesProceedings paper