A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures

Pinardi, KuntjoroKuntjoroPinardiJain, SureshSureshJainWillander, M.M.WillanderAtkinson, A.A.AtkinsonMaes, HermanHermanMaesVan Overstraeten, RogerRogerVan Overstraeten2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2864A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structuresJournal article