Chévrier, Jean-BaptisteJean-BaptisteChévrierBaert, KrisKrisBaertSlater, TimTimSlaterVerbist, AgnesAgnesVerbist2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/75Micromachined infrared pneumatic detector for gas sensorProceedings paper