Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

Izukashi, K.K.IzukashiMatsubayashi, D.D.MatsubayashiBelmonte, A.A.BelmonteKundu, S.S.KunduWan, Y.Y.WanRedondo, F. G.F. G.RedondoOh, H.H.OhSharma, A.A.SharmaSubhechha, S.S.SubhechhaPuliyalil, H.H.PuliyalilChasin, A.A.ChasinDekkers, H.H.DekkersPavel, A.A.PavelRassoul, N.N.RassoulKar, G. S.G. S.Kar2025-07-142025-07-142025-JUL0741-3106WOS:001521504000027https://imec-publications.be/handle/20.500.12860/45904Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAMJournal article10.1109/LED.2025.3564187WOS:001521504000027