The impact of probe penetration on the electrical characterization of sub-50 nm profiles

Clarysse, TrudoTrudoClarysseVanhaeren, DanielleDanielleVanhaerenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5151The impact of probe penetration on the electrical characterization of sub-50 nm profilesProceedings paper