Hikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardVanherle, WendyWendyVanherleVandervorst, WilfriedWilfriedVandervorstDekoster, JohanJohanDekosterLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20816An investigation of growth and properties of Si capping layers used in advanced SiGe/Ge based pMOS transistorsMeeting abstracthttp://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=06222512