Rafi, Joan MarcJoan MarcRafiSimoen, EddyEddySimoenClaeys, CorCorClaeysUlyashin, A.G.A.G.UlyashinJob, R.R.JobFahrner, W.R.W.R.FahrnerVersluys, J.J.VersluysClauws, P.P.ClauwsLozano, M.M.LozanoCampabadal, F.F.Campabadal2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8055Analysis of oxygen thermal donor formation in n-type CZ siliconProceedings paper