Optical phonons in thin AlN films: thickness dependent frequency and lifetime behaviour

Popedinskas, P.P.PopedinskasD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19599Optical phonons in thin AlN films: thickness dependent frequency and lifetime behaviourOral presentation