Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions

Armini, SilviaSilviaArminiZyulkov, IvanIvanZyulkov2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30145Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensionsMeeting abstracthttps://www2.avs.org/symposium2018/Papers/Paper_SE+PS-TuM3.html