Frequency-dependent line capacitance and conductance calculations of on-chip interconnects on silicon substrate using Fourier cosine series approach

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersVandenberghe, S.S.VandenbergheMaex, KarenKarenMaexDe Roest, DavidDavidDe RoestStucchi, MicheleMicheleStucchi2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5865Frequency-dependent line capacitance and conductance calculations of on-chip interconnects on silicon substrate using Fourier cosine series approachJournal article