Cuypers, DanielDanielCuypersDe Gendt, StefanStefanDe GendtArnauts, SophiaSophiaArnautsPaulussen, KrisKrisPaulussenvan Dorp, DennisDennisvan Dorp2021-10-212021-10-2120132162-8769https://imec-publications.be/handle/20.500.12860/22194Wet chemical etching of InP for cleaning applications: I. An oxide formation/oxide dissolution modelJournal article