Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and M2Cs2+ yields

Brison, J.J.BrisonConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstHoussiau, L.L.Houssiau2021-10-152021-10-152004-05https://imec-publications.be/handle/20.500.12860/8638Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and M2Cs2+ yieldsProceedings paper