TXRF analysis of trace metals in thin silicon nitride films

Vereecke, GuyGuyVereeckeArnauts, SophiaSophiaArnautsVerstraeten, KarelKarelVerstraetenSchaekers, MarcMarcSchaekersHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4906TXRF analysis of trace metals in thin silicon nitride filmsMeeting abstract