High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.J.A.van den BergReading, M. A.M. A.ReadingParisini, A.A.ParisiniKolbe, M.M.KolbeBeckhoff, B.B.BeckhoffLadas, S.S.LadasFried, M.M.FriedPetrik, P.P.PetrikBailey, P.P.BaileyNoakes, T.T.NoakesConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16361High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPSProceedings paper