Effect of deposition parameters on A1:ZnO transparant conductive oxide thin films prepared by DC sputtering

Atalay, AhmedAhmedAtalayVan Gompel, MathiasMathiasVan GompelD'Haen, JanJanD'HaenTurner, StuartStuartTurnerVan Tendeloo, G.G.Van TendelooHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23506Effect of deposition parameters on A1:ZnO transparant conductive oxide thin films prepared by DC sputteringOral presentation