A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node

Tsai, Yi-PeiYi-PeiTsaiChang, Yi-HanYi-HanChangWang, JaneJaneWangTrivkovic, DarkoDarkoTrivkovicRonse, KurtKurtRonseKim, Ryan Ryoung hanRyan Ryoung hanKim2023-06-022022-09-162023-06-022022978-1-5106-4979-80277-786XWOS:000844431900002https://imec-publications.be/handle/20.500.12860/40427A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology nodeProceedings paper10.1117/12.2617415978-1-5106-4980-4WOS:000844431900002