Selvaraja, ShankarShankarSelvarajaSleeckx, ErikErikSleeckxSchaekers, MarcMarcSchaekersBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutDumon, PieterPieterDumonBaets, RoelRoelBaets2021-10-182021-10-1820090030-4018https://imec-publications.be/handle/20.500.12860/16198Low-loss amorphous sSilicon-on-iInsulator technology for photonic integrated circuitryJournal article