Shohet, J. LeonJ. LeonShohetKim, Sang-HeumSang-HeumKimNguyen, HaHaNguyenXue, PanpanPanpanXueBlatz, JoshuaJoshuaBlatzCheng, HaoyuHaoyuChengLin, Yi-HungYi-HungLinde Marneffe, Jean-FrancoisJean-Francoisde MarneffeRedzheb, MuradMuradRedzhebArmini, SilviaSilviaArminiChen, Cheng-chiCheng-chiChenWu, YutingYutingWu2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31772Vacuum-ultraviolet-radiation damage of low-k dielectricsMeeting abstracthttps://www2.avs.org/symposium2018/Papers/Paper_PS-TuP22.html