Simple and robust air gap-based MEMS technology for RF-applications

Ekkels, PhillipPhillipEkkelsRottenberg, XavierXavierRottenbergPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-172021-10-172008-07https://imec-publications.be/handle/20.500.12860/13691Simple and robust air gap-based MEMS technology for RF-applicationsProceedings paper